A Study on the Electrical and Optical Properties of SnO 2 :Sb Thin Films Prepared by Different Conditions for Photovoltaic Applications
作者：
DOI: 10.4313/JKEM.2009.22.3.269
关键词:
摘要: Antimony doped tin oxide () films, which are used as the front contact and back reflector of thin film solar cells, have been deposited by d,c, magnetron sputtering. The dependence electrical optical properties films on preparation conditions, such gas ratio, substrate temperature, annealing temperature was investigated. sputter composition found to affect films. With incorporating gas, significantly were improved. minimum resistivity transmittance over 80 % in visible region obtained at oxygen concentration 30 %, When higher, decreased, while absorption edge shifted shorter wavelength, indicating higher band gap. Heat treatment resulted poorer due SnO phase (102) plane.
koreascience.or.kr参考文章(13)
Jin Ma, Xiaotao Hao, Honglei Ma, Xiangang Xu, Yingge Yang, Shulai Huang, Deheng Zhang, Chuanfu Cheng, RF magnetron sputtering SnO2: Sb films deposited on organic substrates Solid State Communications. ,vol. 121, pp. 345- 349 ,(2002) , 10.1016/S0038-1098(02)00009-1
J. Sanz Maudes, T. Rodríguez, Sprayed SnO2 films: Growth mechanism and film structure characterization Thin Solid Films. ,vol. 69, pp. 183- 189 ,(1980) , 10.1016/0040-6090(80)90035-8
Jaehyeong Lee, Effects of oxygen concentration on the properties of sputtered SnO2:Sb films deposited at low temperature Thin Solid Films. ,vol. 516, pp. 1386- 1390 ,(2008) , 10.1016/J.TSF.2007.05.027
M.A Gubbins, V Casey, S.B Newcomb, Nanostructural characterisation of SnO2 thin films prepared by reactive r.f. magnetron sputtering of tin Thin Solid Films. ,vol. 405, pp. 270- 275 ,(2002) , 10.1016/S0040-6090(01)01728-X
H.L Ma, D.H Zhang, Y.P Chen, S.Y Li, J Ma, F.J Zong, Large scale fluorine doped textured transparent conducting SnO2 films deposited by atmospheric pressure chemical vapour deposition Thin Solid Films. ,vol. 298, pp. 151- 155 ,(1997) , 10.1016/S0040-6090(96)09155-9
Keun-Soo Kim, Seog-Young Yoon, Won-Jae Lee, Kwang Ho Kim, Surface morphologies and electrical properties of antimony-doped tin oxide films deposited by plasma-enhanced chemical vapor deposition Surface & Coatings Technology. ,vol. 138, pp. 229- 236 ,(2001) , 10.1016/S0257-8972(00)01114-2
K.Y Rajpure, M.N Kusumade, Michael N Neumann-Spallart, C.H Bhosale, Effect of Sb doping on properties of conductive spray deposited SnO2 thin films Materials Chemistry and Physics. ,vol. 64, pp. 184- 188 ,(2000) , 10.1016/S0254-0584(99)00256-4
A. Rohatgi, S. Narasimha, Design, fabrication, and analysis of greater than 18% efficient multicrystalline silicon solar cells Solar Energy Materials and Solar Cells. ,vol. 48, pp. 187- 197 ,(1997) , 10.1016/S0927-0248(97)00102-5
S Shanthi, C Subramanian, P Ramasamy, Growth and characterization of antimony doped tin oxide thin films Journal of Crystal Growth. ,vol. 197, pp. 858- 864 ,(1999) , 10.1016/S0022-0248(98)01066-5
G Frank, E Kauer, H Köstlin, Transparent heat-reflecting coatings based on highly doped semiconductors Thin Solid Films. ,vol. 77, pp. 107- 118 ,(1981) , 10.1016/0040-6090(81)90365-5