An optical method for determination of the mass thickness of thin gold films with arbitrary morphology
作者： Sergey V. Starinskiy , Alexey I. Safonov , Veronica S. Sulyaeva , Alexey A. Rodionov , Yuri G. Shukhov
DOI: 10.1016/J.TSF.2020.138392
关键词:
摘要: Abstract The mass thickness of thin metal films is an important parameter determining the film structure, however a robust routine method for its determination still missing. In this work, we have developed simple optical gold with arbitrary morphology on transparent substrates in range 1–20 nm. based spectrophotometry far-UV when light attenuation due to interaction core electrons and thus influence negligible. calibration was performed at wavelength 200 nm known good agreement Beer–Lambert law obtained. feasibility demonstrated various morphologies produced quartz by pulsed laser deposition.
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