作者: C. C. Williams , H. K. Wickramasinghe
DOI: 10.1007/978-3-540-48181-2_97
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摘要: A new high resolution thermal microscope has been demonstrated, capable of imaging fields with sub-100-nm resolution. It is based upon a non-contacting near field probe. The probe consists thermocouple sensor on the end tip 100 nm dimensions. scanned over surface under servo control to maintain constant gap between and surface. Simultaneously, periodically heated by an external source (current or laser) resultant ac temperature variation measured. Two electronic images are produced, one topography other distribution sample latest indicate lateral below sensitivity 1 millidegree. These measurements demonstrate microscopy spatial which order magnitude greater than achieved techniques date. basic theory experimental work will be described. Thermal surfaces electrical current optically absorbed power presented.