Reactive Evaporation of Metal Wire and Microdeposition of Metal Oxide Using Atmospheric Pressure Reactive Microplasma Jet
作者： Yoshiki Shimizu , Arumugam Chandra Bose , Davide Mariotti , Takeshi Sasaki , Kazuhiro Kirihara
DOI: 10.1143/JJAP.45.8228
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摘要: … 3.1 Characterization of deposits Figure 2(a) shows an SEM image of the tower-shaped deposit … This tower shape was typically observed at gas flow rates of 20 to 40ccm. However, the …
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