Graphoepitaxy of self-assembled block copolymers on two-dimensional periodic patterned templates.
作者： Ion Bita , Joel KW Yang , Yeon Sik Jung , Caroline A Ross , Edwin L Thomas
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摘要: Self-assembling materials are the building blocks of bottom-up nanofabrication processes, but they need to be templated impose long-range order and eliminate defects. In this work, self-assembly a thin film spherical-morphology block copolymer is using an array nanoscale topographical elements that act as surrogates for minority domains copolymer. The orientation periodicity resulting spherical microdomains governed by commensurability between period template accurately described free-energy model. This method, which forms high-spatial-frequency arrays lower-spatial-frequency template, will useful in nanolithography applications such formation high-density microelectronic structures.
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