Characterization of fast-response and low-noise poly si uncooled far infrared sensor
作者： R. R. Neli , I. Doi , J. A. Diniz
DOI: 10.1109/LASCAS.2014.6820276
关键词:
摘要: This work has as a main goal the characterization of thermal sensors, described bolometer, which are dedicated to far infrared radiation detection. These sensors fabricated using microfabrication techniques and thin films selective wet etching. mechanical microstructures formed on silicon wafers surface As these structures obtained conventional for integrated circuits manufacturing, it becomes possible perform monolithic integration electronics devices, allowing microsystems development. The porous gold or “gold black” used absorber, showed absorption index greater than 80%.
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