Structure of metal e-fuse
作者： Wai-Kin Li , Chunyan E. Tian , Ping-Chuan Wang , Ronanld Filippi
DOI:
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摘要: Structures of electronic fuses (e-fuse) are provided. An un-programmed e-fuse includes a via first conductive material having bottom and sidewalls with portion the being covered by liner formed on top dielectric layer, second path layer paths conductively connected through, only at sidewalls. A programmed via; side separated from void; different in contact through via.
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