Apparatus for controlling the temperature of an rf ion source window
作者： Costel Biloiu , Shardul Patel , Frank Sinclair , Victor Benveniste , Bon-Woong Koo
DOI:
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摘要: An RF ion source utilizing a heating/RF-shielding element for controlling the temperature of an window and to act as shielding source. When heating/RF is in heating mode, it suppresses formation unwanted deposits on which negatively impacts transfer energy from antenna plasma chamber. provides electrostatic
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