Characterization of laser-nitrided iron and sputtered iron nitride films

摘要: Laser-nitriding may be a promising technique for substituting conventional nitriding processes. We have irradiated pure iron with pulses of an excimer laser and achieved high nitrogen contents in thin surface layer. found that the is dissolved into γ-Fe, leading to large amount retained austenite. This was also verified by X-ray diffraction (XRD) measurements. Three subspectra can resolved Mossbauer spectra (CEMS) this The concentration calculated terms site occupation, indicating content as 16(1) at%, which consistent results Rutherford backscattering spectroscopy (RBS), resonant nuclear reaction analysis (RNRA) Auger electron (AES) more than solubility limit γ-Fe(N). By reactive magnetron-sputtering it possible produce nitride films various stoichiometries. report on production ofe-Fe x N FeN y films. These were again characterized CEMS, RBS, RNRA (15N(p, αγ)) XRD. Fore-Fe N, produced range 2⩽x⩽3 medium flows during sputtering, well different sites, enabling accurate calculation content. For sputtering phase withy>0.5 produced. not reported Fe-N diagram.