Enhancement of the photon extraction of green and blue LEDs by patterning the indium tin oxide top layer
作者： Kyeong-Jae Byeon , Eun-Ju Hong , Hyoungwon Park , Ki-Yeon Yang , Jong Hyeob Baek
DOI: 10.1088/0268-1242/24/10/105004
关键词:
摘要: The indium tin oxide (ITO) transparent electrode layer on green and blue light-emitting diodes (LEDs) was patterned with various-sized periodic hole arrays, size ranging from 300 nm to 380 nm, using thermal nanoimprint lithography inductively coupled plasma (ICP) etching processes. imprinted resin used as a mask etch resistance of the adjusted in order control tapered enlarged profile ITO layer, since can improve light extraction efficiency LED by prominent scatterings. Photoluminescence intensity InGaN multi-quantum wells for structure showed that up 4.6 times stronger emission exhibited electrode, compared identical sample an un-patterned blanket layer. An electroluminescence (EL) witha increased 23%
harvard.edu
elsevier.com
sci-hub.se 参考文章(22)
T. Stomeo, E. Di Fabrizio, D. Cojoc, M. De Vittorio, M. T. Todaro, R. Cingolani, Two-dimensional photonic crystal waveguide obtained by e-beam direct writing of SU8-2000 photoresist Microelectronic Engineering. ,vol. 73, pp. 388- 391 ,(2004) , 10.1016/J.MEE.2004.02.075
Xiangsu Zhang, Shou Liu, Ying Liu, Xiaoyun Chen, Han Lin, Xuechang Ren, Enhancement of LED light extraction via diffraction of hexagonal lattice fabricated in ITO layer with holographic lithography and wet etching Physics Letters A. ,vol. 372, pp. 3738- 3740 ,(2008) , 10.1016/J.PHYSLETA.2008.02.014
Hyun Kyong Cho, Junho Jang, Jeong-Hyeon Choi, Jaewan Choi, Jongwook Kim, Jeong Soo Lee, Beomseok Lee, Young Ho Choe, Ki-Dong Lee, Sang Hoon Kim, Kwyro Lee, Sun-Kyung Kim, Yong-Hee Lee, Light extraction enhancement from nano-imprinted photonic crystal GaN-based blue light-emitting diodes. Optics Express. ,vol. 14, pp. 8654- 8660 ,(2006) , 10.1364/OE.14.008654
Dong-Ho Kim, Chi-O Cho, Yeong-Geun Roh, Heonsu Jeon, Yoon Soo Park, Jaehee Cho, Jin Seo Im, Cheolsoo Sone, Yongjo Park, Won Jun Choi, Q-Han Park, None, Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns Applied Physics Letters. ,vol. 87, pp. 203508- ,(2005) , 10.1063/1.2132073
Iwan Märki, Martin Salt, Hans Peter Herzig, Ross Stanley, L. El Melhaoui, P. Lyan, J. M. Fedeli, Characterization of buried photonic crystal waveguides and microcavities fabricated by deep ultraviolet lithography Journal of Applied Physics. ,vol. 98, pp. 013103- ,(2005) , 10.1063/1.1948507
Aurélien David, Tetsuo Fujii, Rajat Sharma, Kelly McGroddy, Shuji Nakamura, Steven P. DenBaars, Evelyn L. Hu, Claude Weisbuch, Henri Benisty, Photonic-crystal GaN light-emitting diodes with tailored guided modes distribution Applied Physics Letters. ,vol. 88, pp. 061124- ,(2006) , 10.1063/1.2171475
F.B. Naranjo, E. Calleja, Z. Bougrioua, A. Trampert, X. Kong, K.H. Ploog, Efficiency optimization of p-type doping in GaN:Mg layers grown by molecular-beam epitaxy Journal of Crystal Growth. ,vol. 270, pp. 542- 546 ,(2004) , 10.1016/J.JCRYSGRO.2004.07.019
ZS Zhang, B Zhang, J Xu, K Xu, ZJ Yang, ZX Qin, TJ Yu, DP Yu, None, Effects of symmetry of GaN-based two-dimensional photonic crystal with quasicrystal lattices on enhancement of surface light extraction Applied Physics Letters. ,vol. 88, pp. 171103- ,(2006) , 10.1063/1.2199491
S. Sayan, N. V. Nguyen, J. Ehrstein, J. J. Chambers, M. R. Visokay, M. A. Quevedo-Lopez, L. Colombo, D. Yoder, I. Levin, D. A. Fischer, M. Paunescu, O. Celik, E. Garfunkel, Effect of nitrogen on band alignment in HfSiON gate dielectrics Applied Physics Letters. ,vol. 87, pp. 1- 3 ,(2005) , 10.1063/1.2135390
Kyeong-Jae Byeon, Seon-Yong Hwang, Heon Lee, Fabrication of nano-hole array patterns on transparent conducting oxide layer using thermally curable nanoimprint lithography Microelectronic Engineering. ,vol. 85, pp. 830- 833 ,(2008) , 10.1016/J.MEE.2007.12.078