Molecular Layer Deposition of Hybrid Organic–Inorganic Films

Leo D. Salmi, Esa Puukilainen, Marko Vehkamäki, Mikko Heikkilä, Mikko Ritala, Atomic Layer Deposition of Ta2O5/Polyimide Nanolaminates† Chemical Vapor Deposition. ,vol. 15, pp. 221- 226 ,(2009) , 10.1002/CVDE.200906770

Tetsuzo Yoshimura, Satoshi Tatsuura, Wataru Sotoyama, Azuma Matsuura, Tomoaki Hayano, Quantum wire and dot formation by chemical vapor deposition and molecular layer deposition of one‐dimensional conjugated polymer Applied Physics Letters. ,vol. 60, pp. 268- 270 ,(1992) , 10.1063/1.106681

B. B. Burton, D. N. Goldstein, S. M. George, Atomic Layer Deposition of MgO Using Bis(ethylcyclopentadienyl)magnesium and H2O Journal of Physical Chemistry C. ,vol. 113, pp. 1939- 1946 ,(2009) , 10.1021/JP806088M

Y. Du, S. M. George, Molecular Layer Deposition of Nylon 66 Films Examined Using in Situ FTIR Spectroscopy Journal of Physical Chemistry C. ,vol. 111, pp. 8509- 8517 ,(2007) , 10.1021/JP067041N

Qing Peng, Bo Gong, Ryan M VanGundy, Gregory N Parsons, “Zincone” Zinc Oxide−Organic Hybrid Polymer Thin Films Formed by Molecular Layer Deposition Chemistry of Materials. ,vol. 21, pp. 820- 830 ,(2009) , 10.1021/CM8020403

J. W. Elam, D. Routkevitch, S. M. George, Properties of ZnO'Al 2 O 3 Alloy Films Grown Using Atomic Layer Deposition Techniques Journal of The Electrochemical Society. ,vol. 150, ,(2003) , 10.1149/1.1569481

David C. Miller, Ross R. Foster, Yadong Zhang, Shih-Hui Jen, Jacob A. Bertrand, Zhixing Lu, Dragos Seghete, Jennifer L. O’Patchen, Ronggui Yang, Yung-Cheng Lee, Steven M. George, Martin L. Dunn, The Mechanical Robustness of Atomic-Layer- and Molecular-Layer-Deposited Coatings on Polymer Substrates Journal of Applied Physics. ,vol. 105, pp. 093527- ,(2009) , 10.1063/1.3124642

Steven M. George, Byunghoon Yoon, Arrelaine A. Dameron, Surface chemistry for molecular layer deposition of organic and hybrid organic-inorganic polymers. Accounts of Chemical Research. ,vol. 42, pp. 498- 508 ,(2009) , 10.1021/AR800105Q

Byunghoon Yoon, Dragos Seghete, Andrew S. Cavanagh, Steven M. George, Molecular Layer Deposition of Hybrid Organic−Inorganic Alucone Polymer Films Using a Three-Step ABC Reaction Sequence Chemistry of Materials. ,vol. 21, pp. 5365- 5374 ,(2009) , 10.1021/CM9013267

J. W. Elam, S. M. George, Growth of ZnO/Al2O3 Alloy Films Using Atomic Layer Deposition Techniques Chemistry of Materials. ,vol. 15, pp. 1020- 1028 ,(2003) , 10.1021/CM020607+