Josephson devices and process for manufacturing the same
作者： Kentaro Setsune , Shigemi Kohiki , Tomoaki Matsushima , Koichi Mizuno , Shinichiro Hatta
DOI:
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摘要: A Josephson device, comprising a junction formed by forming the first layer-shaped oxide superconductor thin film including plurality of Cu-O layers on substrate, barrier layer thereon and second layer. The device according to present invention is manufactured in same vacuum chamber, defining patterns said film, an interlayer insulating layer, removing region serving as junction, effecting exposure oxygen plasma, contact with part surface film.
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