Energy resolved actinometry for simultaneous measurement of atomic oxygen densities and local mean electron energies in radio-frequency driven plasmas

作者: Arthur Greb , Kari Niemi , Deborah O'Connell , Timo Gans

DOI: 10.1063/1.4903931

关键词:

摘要: A diagnostic method for the simultaneous determination of atomic oxygen densities and mean electron energies is demonstrated an atmospheric pressure radio-frequency plasma jet. The proposed based on phase resolved optical emission measurements direct dissociative electron-impact excitation dynamics three distinct lines, namely, Ar 750.4 nm, O 777.4 nm, 844.6 nm. energy dependence these lines serves as basis analysis by taking into account two line ratios. In this frame, highly adaptable with regard to gas composition. Results are benchmarked against independent numerical simulations two-photon absorption laser-induced fluorescence experiments.

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