Optics and design of the fringe field monochromator for a Schottky field emission gun
作者： H.W Mook , P Kruit
DOI: 10.1016/S0168-9002(98)01511-3
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摘要: Abstract For the improvement of high-resolution electron energy loss spectroscopy a new source monochromator, based on Wien filter principle, is presented. In fringe field monochromator electric and magnetic fields are tightly enclosed by clamps to satisfy condition, E=vB. The whole including 150 nm selection slits (Nanoslits) positioned in gun area. Its total length only 42 mm. Using trajectory simulation through dispersion aberrations determined. parasitic astigmatism lens needs be corrected using an electrostatic quadrupole incorporated filter. Estimations influence electrode misalignment show that at least six electrodes must used loosen alignment demands sufficiently. theoretical estimations Coulomb interaction final resolution, beam brightness current predicted. Schottky emission with typical 108 A/sr m2 V expected produce 50 meV 1 nA 107.
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