参考文章(7)
J.G. Swanson, D.S. Campbell, The structural and electrical properties of 80:20 NiCr thin films Thin Solid Films. ,vol. 1, pp. 183- 202 ,(1967) , 10.1016/0040-6090(67)90002-8
R.G. Duckworth, Tantalum thin film resistors Thin Solid Films. ,vol. 10, pp. 337- 353 ,(1972) , 10.1016/0040-6090(72)90205-2
Robert K. Waits, Sputtered Silicon–Chromium Resistive Films Journal of Vacuum Science and Technology. ,vol. 6, pp. 308- 315 ,(1969) , 10.1116/1.1492682
P.N. Baker, Preparation and properties of tantalum thin films Thin Solid Films. ,vol. 14, pp. 3- 25 ,(1972) , 10.1016/0040-6090(72)90365-3
I. Nishida, The crystal growth and thermoelectric properties of chromium disilicide Journal of Materials Science. ,vol. 7, pp. 1119- 1124 ,(1972) , 10.1007/BF00550193