Effect of boron implantation on the electrical and photoelectrical properties of e-beam deposited Ag–In–Se thin films

作者: T Çolakoğlu , M Parlak , M Kulakci , R Turan

DOI: 10.1088/0022-3727/41/11/115308

关键词:

摘要: In this study, e-beam evaporated Ag‐In‐Se (AIS) thin films were doped by the implantation of boron (B) ions at 75keV with a dose 1 ×10 15 ionscm −2 and subsequent annealing process was applied to AIS different temperatures under nitrogen atmosphere. The effects on electrical photoelectrical properties investigated through temperature dependent conductivity, spectral photoresponse photoconductivity measurements illumination intensities. conductivity showed that room values determined as 2.4 × 10 −7 (� cm) −1 ,1 .7 −6 8.9 −5 for B-doped (B0), annealed 200 ◦ C (B2) 300 (B3), respectively. It observed improved increased up 400 which degenerate semiconductor behaviour. distribution curves indicated three local maxima located 1.63, 1.79 2.01eV B0 type films, 1.65, 1.87 2.07eV B2 1.73, 2.02 2.32eV B3 temperature. These energy ascribed splitting valence band due spin‐orbit interaction crystalline lattice field effects. first each set be gaps films. function intensity performed in order determine nature recombination processes found thermally quenched all types variation photocurrent dependence supralinear. two-centre model successfully explain behaviours

参考文章(34)
Lawrence L. Kazmerski, Polycrystalline and amorphous thin films and devices Academic Press. ,(1980)
Richard H. Bube, David Redfield, Photo-induced Defects in Semiconductors ,(1996)
Z. L. Liu, P. P. Chen, C. Wang, T. X. Li, H. Y. Cui, Y. J. Li, X. S. Chen, W. Lu, Effects of rapid thermal annealing on the properties of GaNxAs1−x Journal of Applied Physics. ,vol. 101, pp. 113514- ,(2007) , 10.1063/1.2736282
S. H. You, K. J. Hong, T. S. Jeong, C. J. Youn, J. S. Park, D. C. Shin, J. D. Moon, Band gap energy and valence band splitting of p-CdIn2Te4 crystal by photocurrent spectroscopy Journal of Applied Physics. ,vol. 95, pp. 4042- 4045 ,(2004) , 10.1063/1.1686901
M. H. Ya, Y. F. Chen, Y. S. Huang, Nonlinear behaviors of valence-band splitting and deformation potential in dilute GaNxAs1−x alloys Journal of Applied Physics. ,vol. 92, pp. 1446- 1449 ,(2002) , 10.1063/1.1488240
N Suri, K S Bindra, R Thangaraj, Electrical conduction and photoconduction in Se80−xTe20Bix thin films Journal of Physics: Condensed Matter. ,vol. 18, pp. 9129- 9134 ,(2006) , 10.1088/0953-8984/18/39/038
J. L. Queisser, J. H. Wernick, Archibald L. Fripp, Ternary Chalcopyrite Semiconductors: Growth, Electronic Properties, and Applications Journal of The Electrochemical Society. ,vol. 123, ,(1976) , 10.1149/1.2132889
T. S. Jeong, K. J. Hong, Temperature dependence of intensity and peak position from photocurrent response in p-CdIn2Te4 crystal Journal of Applied Physics. ,vol. 96, pp. 204- 207 ,(2004) , 10.1063/1.1758311
C M Joseph, C S Menon, Electrical conductivity, optical absorption and structural studies in thin films Semiconductor Science and Technology. ,vol. 11, pp. 1668- 1671 ,(1996) , 10.1088/0268-1242/11/11/005