Systems and methods for drive laser beam delivery in an euv light source
作者： William N. Partlo , Jason Paxton , Igor V. Fomenkov
DOI:
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摘要: An EUV light source device is described herein which may comprise a laser beam travelling along path, at least portion of the path aligned linear axis; material for interaction with an irradiation site to create emitting plasma; first reflector having focal point, positioned point on axis, receiving path; and second reflected by directing toward site.
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