Laser beam controlling device and extreme ultraviolet light generating apparatus
作者： Osamu Wakabayashi , Toru Suzuki
DOI:
关键词: Laser Doppler vibrometer 、 Optoelectronics 、 Wavefront 、 Beam (structure) 、 Laser beam quality 、 Beam parameter product 、 Optics 、 Controller (computing) 、 Laser 、 Materials science 、 Beam expander
摘要: A laser beam controlling device may include: a guide device; wavefront adjuster provided in path of the outputted from combiner configured to adjust travel directions system and coincide with each other, both combiner, monitor adjuster, controller control based on detection results at respect beam.
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