Integrated tunable fabry-perot filter and method of making same

摘要: A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and deformable or movable membrane reflector. second electrostatic outside of the pair electrodes, one which is mechanically coupled to voltage applied electrodes across causes deflection membrane, thereby changing length tuning filter. The with can be formed micro device photolithographic fabrication processes from semiconductor material in integrated structure. include inner portion connected within outer body pattern tethers. tether such that straight radial tethers connect body. Alternatively, arranged substantially spiral used.