Miniature Fabry Perot spectrometers using micromachining technology
作者： P.M. Zavracky , E. Hennenberg
DOI: 10.1109/WESCON.1995.485299
关键词: Micro-Opto-Electro-Mechanical Systems 、 Silicon 、 Optoelectronics 、 Surface micromachining 、 Optics 、 Waveguide (optics) 、 Materials science 、 Silicon photonics 、 Interferometry 、 Fabry–Pérot interferometer 、 Etching (microfabrication)
摘要:
sci-hub.se 参考文章(5)
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