Surface micromachined tuneable interferometer array

摘要: Abstract The development of compact light modulators integrated on the same chip as signal processing opens many opportunities for combining inter-chip optical communications with standard silicon circuitry. use surface micromachining allows high speed operation and small size integration other mechanical requirements devices also have to be considered, ensure compatability processing. A process, using an oxide sacrificial layer poly/nitride/poly membranes, has been developed. This paper presents considerations in a micromachined Fabry-Perot interferometer. Initial tests shown that these membranes represent effective modulating method.