Laser chemical vapour deposition: materials, modelling, and process control
作者： C. Duty , D. Jean , W.J. Lackey
DOI: 10.1179/095066001771048727
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摘要: … the focused laser spot. This fact, thin films are often deposited when the laser point source chemical … Pulsed lasers sional diffusion paths for gases to diffuse into and (Ar+, ArF, KrF) in the …
sci-hub.se 参考文章(117)
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