Modeling KrF excimer laser induced deposition of titanium from titanium tetrachloride

摘要: Abstract KrF excimer laser induced deposition of titanium from tetrachloride (TiCl4) occurs through the photodecomposition adsorbed TiCl4 layer. We propose two growth regimes. During an initiation phase, up to 3 nm in thickness, layer is photochemically decomposed giving a rate ∼ 0.015 nm/pulse. In second increases between 2 and 7 nm/pulse due heating preceding deposited film. Between consecutive pulses, molecules primarily diffuse reaction zone leading new ready be transformed solid titanium.