Methods For ALD Of Metal Oxides On Metal Surfaces
作者： Mark Saly , Li-Qun Xia , David Thompson , Bhaskar Jyoti Bhuyan
DOI:
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摘要: Methods for depositing metal oxide layers on surfaces are described. The methods include exposing a substrate to separate doses of precursor, which does not contain metal-oxygen bonds, and an alcohol. These do oxidize the underlying layer.
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