Photochemical Reaction of Ozone and 1,1,1,3,3,3-Hexamethyldisilazane: Analysis of the Gas Reaction between Precursors in a Photochemical Vapor Deposition Process
作者： Ken Nakamura , Hidehiko Nonaka , Naoto Kameda , Tetsuya Nishiguchi , Shingo Ichimura
DOI: 10.1143/JJAP.47.7349
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摘要: The photochemical reaction of 1,1,1,3,3,3-hexamethyldisilazane (HMDS) and ozone (O3) in the gas phase was analyzed as side vapor deposition (photo-CVD) process irradiated by ultraviolet light: analysis conducted Fourier-transform infrared absorption spectroscopy (FT-IR) mass spectrometry (MS). final products this between HMDS O3 are CO2, N2, H2O, although is initiated at Si–N–Si bond with (UV) light, thus producing, a intermediate, compound carbonyl and/or carboxylic group followed scission.
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