UV/ozone degradation of gaseous hexamethyldisilazane (HMDS).

摘要: Abstract As a carcinogen, hexamethyldisilazane (HMDS) is extensively adopted in life science microscopy, materials and nanotechnology. However, no appropriate technology has been devised for treating HMDS gas streams. This investigation evaluated the feasibility effectiveness of UV (185 + 254 nm) (254 nm)/O 3 processes degradation gaseous HMDS. Tests were performed two batch reactors with initial concentrations 32–41 mg m −3 under various ozone dosages (O (mg)/HMDS (mg) = 1–5), atmospheres (N 2 , O air), temperatures (28, 46, 65 80 °C), relative humilities (20%, 50%, 65%, 99%) volumetric power inputs (0.87, 1.74, 4.07 8.16 W l −1 ) to assess their effects on rate. Results indicate that all conditions, decomposition rates irradiation exceeded those process. decompositions displayed an apparent first-order kinetics. A process air saturated water at 46–80 °C favors degradation. With condition as above P/V around 8 W l k was approximately 0.20 s reaction time just 12 s required degrade over 90% The main mechanisms wet streams irradiated found be caused by OH free-radical oxidation produced from photolysis or O( 1 D) oxygen. economic evaluation factors different also estimated.