Solution deposition of chalcogenide films
作者： David B Mitzi
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摘要: A method of depositing a film metal chalcogenide. The first these methods includes the steps of: contacting at least one chalcogenide, hydrazine compound and optionally, an elemental chalcogen, to produce solution hydrazinium-based precursor chalcogenide; applying chalcogenide onto substrate precursor; thereafter annealing remove excess hydrazinium salts on substrate. second contacting: salt amine ammonium-based compound, in compound; film; thereafter, film. Also provided is thin-film field-effect transistor device using chalcogenides as channel layer.
lens.org 参考文章(18)
Aron Vecht, David William Smith, Preparation of sulphides and selenides ,(1998)
David B. Mitzi, Ioannis Kymissis, Cherie R. Kagan, Christos D. Dimitrakopoulos, Konstantinos Chondroudis, Thin film transistors with organic-inorganic hybrid materials as semiconducting channels ,(1999)
S. E. Shaheen, G. E. Jabbour, B. Kippelen, N. Peyghambarian, J. D. Anderson, S. R. Marder, N. R. Armstrong, E. Bellmann, R. H. Grubbs, Organic light-emitting diode with 20 lm/W efficiency using a triphenyldiamine side-group polymer as the hole transport layer Applied Physics Letters. ,vol. 74, pp. 3212- 3214 ,(1999) , 10.1063/1.124108
J.H. Schön, O. Schenker, B. Batlogg, RETRACTED: Solution processed CdS thin film transistors Thin Solid Films. ,vol. 385, pp. 271- 274 ,(2001) , 10.1016/S0040-6090(00)01908-8
M Krunks, O Kijatkina, H Rebane, I Oja, V Mikli, A Mere, Composition of CuInS2 thin films prepared by spray pyrolysis Thin Solid Films. ,vol. 403, pp. 71- 75 ,(2002) , 10.1016/S0040-6090(01)01534-6
D. B. Mitzi, K. Chondroudis, C. R. Kagan, Organic-inorganic electronics IBM Journal of Research and Development. ,vol. 45, pp. 29- 45 ,(2001) , 10.1147/RD.451.0029
G. C. Chern, I. Lauks, Spin‐coated amorphous chalcogenide films Journal of Applied Physics. ,vol. 53, pp. 6979- 6982 ,(1982) , 10.1063/1.330043
S. Dhingra, M. G. Kanatzidis, The use of Soluble Metal-Polyselenide Complexes as Precursors to Binary and Ternary Solid Metal Selenides MRS Proceedings. ,vol. 180, pp. 825- ,(1990) , 10.1557/PROC-180-825
B.R. Sankapal, R.S. Mane, C.D. Lokhande, Successive ionic layer adsorption and reaction (SILAR) method for the deposition of large area (∼10 cm2) tin disulfide (SnS2) thin films Materials Research Bulletin. ,vol. 35, pp. 2027- 2035 ,(2000) , 10.1016/S0025-5408(00)00405-0
C. D. Dimitrakopoulos, D. J. Mascaro, Organic thin-film transistors: A review of recent advances IBM Journal of Research and Development. ,vol. 45, pp. 11- 27 ,(2001) , 10.1147/RD.451.0011