Optimized detection of normal vibration modes of atomic force microscope cantilevers with the optical beam deflection method
作者： Tilman E. Schäffer , Harald Fuchs
DOI: 10.1063/1.1872202
关键词:
摘要: Recently, higher-order normal vibration modes of atomic force microscope cantilevers were utilized for functional imaging applications. Here, we present a detailed theoretical investigation the sensitivities with which these are detected using optical beam deflection method. The detection depend strongly on size and position focused spot. Optimization is performed individual (transverse) modes. For case that multiple need to be simultaneously, universal sensitivity function constructed. This generates accurate values as spot diameter mode number. Finally, different optimization strategies simultaneous presented.
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