作者: S. Matsumoto , A. Klein , R. Maeda
DOI: 10.1109/MEMSYS.1999.746791
关键词:
摘要: A micropump based on a novel flow rectification principle was developed. Instead of mechanical check valves, the difference resistance in narrow channels caused by temperature dependence liquid viscosity is utilized as basis valve effect. This method allows flexible control pump function, including bi-directional pumping. prototype device actuated piezoelectric element designed and fabricated to confirm function. The fluidic thermal conditions for actuation, characteristics its behavior revealed experiments are discussed.