Detecting system for scanning microscopes

摘要: A scanning probe microscope is provided with a piezo-ceramic tube to carry the sensitive at its free end translationally move in X and Y directions. Large stationary surfaces can then be scanned by tip motion. The also capable of movement Z direction so that follow contours surface. Optical detection means track motion generate signals corresponding representative surface contours. In one mode operation, are used feed back loop keep constant spacing between surface, which case error or control represent