AFM surface morphology investigation of ion beam modified polyimide
作者： V. Švorčík , E. Arenholz , V. Rybka , V. Hnatowicz
DOI: 10.1016/S0168-583X(96)00829-4
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摘要: Abstract Polyimide Upilex R was irradiated with 90 keV N + ions to the fluences of 1 × 10 14 –2 17 cm −2 . The surface morphology and structure ion beam modified PI were examined using atomic force microscopy X-ray difraction. Sheet resistance as a function fluence sample temperature measured by standard two point technique. Significant changes production graphitic phase in layer irradiation observed. Strong decrease sheet (by 11 orders magnitude) samples is connected progressive carbonization graphitization degraded polymer. Electrical charge transport mediated variable-range hopping mechanism. Drastic structural initiated high are similar those observed polymer pyrolysis.
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