XPS study of SiO thin films and SiO-metal interfaces
作者： T P Nguyen , S Lefrant
DOI: 10.1088/0953-8984/1/31/019
关键词:
摘要: … XPS spectra with those obtained from silicon single crystal and pristine silica. In figure 1 Si 2p spectra of SiOz, Si0 thin film and Si are … The fifth distribution, Si-Si,O, could not be identified …
sci-hub.se 参考文章(26)
Takeo Hattori, Toshihisa Suzuki, Si-SiO2 interface structures on Si(100), (111), and (110) surfaces Applied Physics Letters. ,vol. 43, pp. 470- 472 ,(1983) , 10.1063/1.94392
T.P. Nguyen, S. Lefrant, Interface effects and a.c. properties of metal-SiO-metal structures Solid State Communications. ,vol. 66, pp. 459- 464 ,(1988) , 10.1016/0038-1098(88)90961-1
T.P. Nguyen, S. Lefrant, Raman spectra of silicon monoxide Solid State Communications. ,vol. 57, pp. 235- 236 ,(1986) , 10.1016/0038-1098(86)90146-8
P. J. Grunthaner, M. H. Hecht, F. J. Grunthaner, N. M. Johnson, The localization and crystallographic dependence of Si suboxide species at the SiO2/Si interface Journal of Applied Physics. ,vol. 61, pp. 629- 638 ,(1987) , 10.1063/1.338215
S. Badrinarayanan, S. Sinha, A.P.B. Sinha, Evidence for a solid state reaction at the a-SiSnOx interface: An x-ray photoelectron spectroscopy study Thin Solid Films. ,vol. 144, pp. 133- 137 ,(1986) , 10.1016/0040-6090(86)90075-1
Herbert R Philipp, Optical and bonding model for non-crystalline SiOx and SiOxNy materials Journal of Non-crystalline Solids. pp. 627- 632 ,(1972) , 10.1016/0022-3093(72)90202-5
T.P. Nguyen, S. Minn, Noise measurements in thin film Si0 diodes Solid State Communications. ,vol. 53, pp. 335- 337 ,(1985) , 10.1016/0038-1098(85)90980-9
D.M. Scott, S.S. Lau, R.L. Pfeffer, R.A. Lux, J. Mikkelson, L. Wieluński, M.-A. Nicolet, The Effects of Interfacial SiO2 on Pd2Si Formation Thin Solid Films. ,vol. 104, pp. 227- 233 ,(1983) , 10.1016/S0040-6090(83)80001-7
F. J. Grunthaner, P. J. Grunthaner, R. P. Vasquez, B. F. Lewis, J. Maserjian, A. Madhukar, Local atomic and electronic structure of oxide/GaAs and SiO2/Si interfaces using high-resolution XPS Journal of Vacuum Science and Technology. ,vol. 16, pp. 1443- 1453 ,(1979) , 10.1116/1.570218
C. Senemaud, M.T.Costa Lima, J.A. Roger, A. Cachard, X-ray K absorption spectra of silicon in Si, SiO and SiO2 Chemical Physics Letters. ,vol. 26, pp. 431- 433 ,(1974) , 10.1016/0009-2614(74)89065-2