Surface acoustic wave device with interdigital transducers formed on a holding substrate thereof and a method of producing the same
作者： Shun-ichi Seki , Kazuo Eda , Keiji Onishi , Yutaka Taguchi
DOI:
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摘要: A surface acoustic wave device (31) includes: a holding substrate (1); piezoelectric (3); an interdigital transducer (4e-4d) formed on the substrate; and supports for said so that is evenly in contact with substrate.
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