Antireflective structures on silicon surface using catalytic nickel nanoparticles

作者: M. Pranaitis , L. Jaraminė , V. Čyras , A. Selskis , A. Galdikas

DOI: 10.1063/1.4827838

关键词:

摘要: In this work, we present a nickel assisted electroless deposition and etching method for significant reduction of reflectivity silicon by creating two-scale structured surface. As the first step, nano-texturization process was applied on planar Si wafers in order to optimize process. Next, surface with chemically prepared pyramids produce hierarchical (micron/nano) structure. We found that structure shown very low about 2.2% weighted reflection over broad wavelength range from 300 1100 nm, which is related changes morphology.

参考文章(17)
Zhipeng Huang, Nadine Geyer, Peter Werner, Johannes de Boor, Ulrich Gösele, Metal-Assisted Chemical Etching of Silicon: A Review Advanced Materials. ,vol. 23, pp. 285- 308 ,(2011) , 10.1002/ADMA.201001784
X. Li, P. W. Bohn, Metal-assisted chemical etching in HF/H2O2 produces porous silicon Applied Physics Letters. ,vol. 77, pp. 2572- 2574 ,(2000) , 10.1063/1.1319191
Dianpeng Qi, Nan Lu, Hongbo Xu, Bingjie Yang, Chunyu Huang, Miaojun Xu, Liguo Gao, Zhouxiang Wang, Lifeng Chi, Simple approach to wafer-scale self-cleaning antireflective silicon surfaces. Langmuir. ,vol. 25, pp. 7769- 7772 ,(2009) , 10.1021/LA9013009
S Strehlke, S Bastide, J Guillet, C Lévy-Clément, Design of porous silicon antireflection coatings for silicon solar cells Materials Science and Engineering B-advanced Functional Solid-state Materials. pp. 81- 86 ,(2000) , 10.1016/S0921-5107(99)00272-X
Kui-Qing Peng, Shuit-Tong Lee, Silicon Nanowires for Photovoltaic Solar Energy Conversion Advanced Materials. ,vol. 23, pp. 198- 215 ,(2011) , 10.1002/ADMA.201002410
J. I. Gittleman, E. K. Sichel, H. W. Lehmann, R. Widmer, Textured silicon: A selective absorber for solar thermal conversion Applied Physics Letters. ,vol. 35, pp. 742- 744 ,(1979) , 10.1063/1.90953
Howard M. Branz, Vernon E. Yost, Scott Ward, Kim M. Jones, Bobby To, Paul Stradins, Nanostructured black silicon and the optical reflectance of graded-density surfaces Applied Physics Letters. ,vol. 94, pp. 231121- ,(2009) , 10.1063/1.3152244
B.S. Richards, Single-material TiO2 double-layer antireflection coatings Solar Energy Materials and Solar Cells. ,vol. 79, pp. 369- 390 ,(2003) , 10.1016/S0927-0248(02)00473-7