Low resistivity indium tin oxide films by pulsed laser deposition
作者： J. P. Zheng , H. S. Kwok
DOI: 10.1063/1.109736
关键词:
摘要: … oxide films were grown by pulsed laser deposition on glass substrates. The electrical and optical properties of these films … glass slide) was placed in a clean vacuum chamber. The basic …
scitation.org
harvard.edu
aip.org
sci-hub.se 参考文章(14)
S. Maniv, C. J. Miner, W. D. Westwood, Transparent conducting zinc oxide and indium–tin oxide films prepared by modified reactive planar magnetron sputtering Journal of Vacuum Science and Technology. ,vol. 1, pp. 1370- 1375 ,(1983) , 10.1116/1.572024
Takao Nagatomo, Yukihiro Maruta, Osamu Omoto, Electrical and optical properties of vacuum-evaporated indium-tin oxide films with high electron mobility Thin Solid Films. ,vol. 192, pp. 17- 25 ,(1990) , 10.1016/0040-6090(90)90475-S
H. S. Kwok, J. P. Zheng, S. Witanachchi, P. Mattocks, L. Shi, Q. Y. Ying, X. W. Wang, D. T. Shaw, Growth of highly oriented CdS thin films by laser-evaporation deposition Applied Physics Letters. ,vol. 52, pp. 1095- 1097 ,(1988) , 10.1063/1.99642
H.-J. Krokoszinski, R. Oesterlein, Post-deposition annealing effects in electron-beam-evaporated indium tin oxide thin films Thin Solid Films. ,vol. 187, pp. 179- 186 ,(1990) , 10.1016/0040-6090(90)90122-T
J. P. Zheng, Q. Y. Ying, S. Witanachchi, Z. Q. Huang, D. T. Shaw, H. S. Kwok, Role of the oxygen atomic beam in low-temperature growth of superconducting films by laser deposition Applied Physics Letters. ,vol. 54, pp. 954- 956 ,(1989) , 10.1063/1.100777
R. Groth, Untersuchungen an halbleitenden Indiumoxydschichten physica status solidi (b). ,vol. 14, pp. 69- 75 ,(1966) , 10.1002/PSSB.19660140104
Toshiro Maruyama, Kunihiro Fukui, Indium-tin oxide thin films prepared by chemical vapor deposition Journal of Applied Physics. ,vol. 70, pp. 3848- 3851 ,(1991) , 10.1063/1.349189
John C. C. Fan, Preparation of Sn‐doped In2O3(ITO) films at low deposition temperatures by ion‐beam sputtering Applied Physics Letters. ,vol. 34, pp. 515- 517 ,(1979) , 10.1063/1.90847
S. Naseem, T.J. Coutts, The influence of deposition parameters on the optical and electrical properties of r.f.-sputter- deposited indium tin oxide films Thin Solid Films. ,vol. 138, pp. 65- 70 ,(1986) , 10.1016/0040-6090(86)90215-4
B. J. Kellett, J. H. James, A. Gauzzi, B. Dwir, D. Pavuna, F. K. Reinhart, Insitugrowth of superconducting YBa2Cu3O7−δthin films on Si with conducting indium‐tin‐oxide buffer layers Applied Physics Letters. ,vol. 57, pp. 1146- 1148 ,(1990) , 10.1063/1.104221