Local nonlinear dynamics of MEMS arches actuated by fringing-field electrostatic actuation

摘要: The nonlinear dynamic behavior of a resonant MEMS arch microbeam actuated by fringing electric actuation is investigated in this paper. loaded with DC and AC harmonic load the ground electrodes placed at either side beam. curvature caused imbalance distribution field lines results resultant force. Euler–Bernoulli beam equation was used accordance shallow theory to get motion. Method multiple scales (MMS) perturbation technique perturb near fundamental frequency study its local vicinity considered frequency. Different midpoint elevations were effect on resonance MMS reveals that low initial elevation shows initially softening for small voltage excitation. Then, undergoes hardening when increased. Finally, returns back further increased higher values curling response graph. When increased, known undergo symmetry breaking before regaining even load. there region prior breaking. effective nonlinearity drops more negative making softened After regains symmetry, experiences significant drop now causing be highly high