High-performance silicon photonics technology for telecommunications applications.

摘要: By way of a brief review Si photonics technology, we show that significant improvements in device performance are necessary for practical telecommunications applications. In order to improve photonics, have developed Si-Ge-silica monolithic integration platform, on which compact Si-Ge–based modulators/detectors and silica-based high-performance wavelength filters monolithically integrated. The platform features low-temperature silica film deposition, cannot damage active devices. Using this various integrated photonic devices broadband