Method of manufacturing shallow trench isolation
作者： Chun-Liang Liu , Hsien-Liang Meng , Shih-Ming Lan
DOI:
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摘要: A method for manufacturing a shallow trench isolation. substrate is provided, wherein the has pad oxide on and silicon nitride layer layer, penetrates through into substrate. first conformally formed in trench. rapid thermal process performed. second to fill Portions of layers are removed expose layer.
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