Deposition of molybdenum thin films by an alternate supply of MoCl5 and Zn

作者: Marika Juppo , Marko Vehkamäki , Mikko Ritala , Markku Leskelä

DOI: 10.1116/1.581430

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摘要: Molybdenum thin films were deposited onto both soda lime glass and Al2O3 film by an alternate supply of MoCl5 Zn. Zinc was used as a reducing agent. The growth performed over temperature range 400–500 °C in order to study the effect on growth. In addition temperature, purge length after zinc also seen have considerable analyzed energy dispersive x-ray spectroscopy, scanning electron microscopy, elastic recoil detection analysis, diffraction four point resistance measurements determine their chemical physical characteristics.

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