Chemical composition and structure of titanium oxide films deposited on LTI-carbon by IBED
作者： Xianghui Wang , Feng Zhang , Zhihong Zheng , Lizhi Chen , Huimin Wang
DOI: 10.1016/S0040-6090(99)01082-2
关键词:
摘要: Abstract Titanium oxide films are deposited on low temperature isotropic carbon (LTI-carbon) by ion beam enhanced deposition (IBED). The chemical composition of the prepared is analyzed using X-ray photoelectron spectroscopy (XPS) and Rutherford backscattering (RBS). structure studied glancing angle diffraction (GAXRD) transmission electronic microscopy (TEM). surface morphology film observed means atomic force (AFM). results show that polycrystalline with TiO, Ti 2 O 3 TiO as coexisting phases. mainly influenced pressure. higher pressure is, ratio O/Ti is. cross-sectional high resolution electron image a ‘titanium oxide/amorphous transitional layer/LTI-carbon’ layered has been formed. at 80 keV, more complex than 40 well keV rougher.
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