Application of electrostatic pull-in instability on sensing adsorbate stiffness in nanomechanical resonators
作者： Hamed Sadeghian , Hans Goosen , Andre Bossche , Fred van Keulen , None
DOI: 10.1016/J.TSF.2010.03.036
关键词:
摘要: Recent theoretical and experimental research showed that the response of micro/nanocantilevers to detect materials is not always simply related extra mass. Stiffness adsorbates surface stress-induced changes in stiffness, arising from adsorption, can produce frequency shifts are several times greater magnitude than those induced by mass loading. Consequently, calculated adsorbed does fully represent real mass, making measurements qualitative. Therefore, a proper method for measuring stiffness layers has be combined with resonance measurement quantitatively analyze both stiffness. This letter presents theory application electrostatic pull-in instability at cantilever resonators.
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