Analytical science for the development of microelectronic devices
作者： M. Grasserbauer , G. Stingeder , H. Pötzl , E. Guerrero
DOI: 10.1007/BF00470757
关键词:
摘要: The new technical revolution, the development and introduction of microelectronics poses a great challenge for Analytical Chemistry: material process related analytical problems largely refer to extremely small concentrations spatial dimensions. A successful treatment such is only possible through use most modern, mainly physical techniques, which reason it seems appropriate speak “Analytical Science”.
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sci-hub.se 参考文章(63)
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