Micro Industry Equipments
作者： Masayoshi ESASHI , Takahito ONO , Shuji TANAKA
DOI: 10.1299/JSMEB.47.429
关键词:
摘要: Advanced states of art MEMS (Micro Electro Mechanical Systems) technology have been applied to micro industry equipments. These are electrostatically levitated ring rotor gyroscope and energy source for self moving machines like robots, maintenance systems used in narrow spaces, components multi-column electron beam lithography multi-probe data storage, gas control systems, micro/nano mold, contactor thermal RF relay LSI testing nano-instruments which performs high sensitivity spatial resolution.
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sci-hub.se 参考文章(24)
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