Apparatus and method for insulating a seal in a process chamber

摘要: An apparatus and method are provided for insulating a seal (110) made of polymeric material in pressurized, evacuated or exhausted process chamber (100) that reduces damage due to heat transferred the from chamber. The includes wall (125) having an aperture (140) therein, flange (115) disposed about aperture, insulator (105) between fixture (120) insulate fixture. Generally, cooling tube loop (260) sidewall (262) overlying attached (115), cap (255) loop. has sealing surface (257) against which seats. Fluid may be passed through reduce (110). Preferably, (260), (255), quartz glass, is welded cap. More preferably, functions as light pipe direct radiating away