Heat treating apparatus having heat transmission-preventing plates
作者： Katsushin Miyagi , Miyuki Yamahara
DOI:
关键词: Structural engineering 、 Heat treating 、 Insulator (electricity) 、 Wafer 、 Materials science 、 Composite material 、 Heat transmission
摘要: A heat-treating apparatus for heat treating a plurality of objects-to-be-treated (semiconductor wafers) by loading the into treatment vessel having lower end opened, mounted on heat-treatment boat vertically spaced from each other, and sealing opened includes insulator disposed portion heat-insulating interior reaction vessel. The heat-insulator transmission preventing plates opaque quartz rays heater, support supporting plates. Thus sufficient effect operation can be achieved, stable conducted without impairing function unit. Furthermore, particle formation prevented, with result improved yields heat-treatment.
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