Semiconductor Devices and Methods of Manufacturing Thereof
作者： Matthias Lipinski , Chandrasekhar Sarma , Alois Gutmann , Jingyu Lian , Haoren Zhuang
DOI:
关键词:
摘要: Semiconductor devices and methods of manufacturing thereof are disclosed. A plurality features is formed on a workpiece, the being located in first region second workpiece. Features have lateral dimension, wherein dimension greater than dimension. The masked, reduced.
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