On-Wafer Measurements of Tuneability in Ba0.5Sr0.5TiO3 Thin Films
作者： P. M. SUHERMAN , T. J. JACKSON , Y. KOUTSONAS , R. A. CHAKALOV , M. J. LANCASTER
DOI: 10.1080/10584580490459044
关键词:
摘要: On-wafer dielectric measurements of Ba0.5Sr0.5TiO3 thin films have been established over broad frequency ranges (40 Hz–50 GHz), using metallic coplanar transmission lines patterned onto the films. The show tuneability 27% and 18% at 1.6 kV cm−1 for low microwave frequencies, respectively.
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