作者: Fei Hui , Chengbin Pan , Yuanyuan Shi , Yanfeng Ji , Enric Grustan-Gutierrez
DOI: 10.1016/J.MEE.2016.06.015
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摘要: … In this manuscript, we review the use of hexagonal boron nitride as dielectric, paying … , reliability and dielectric breakdown process. In summary, hexagonal boron nitride is much more …