Using biological principles to design MEMS

摘要: In micromechanics the handling and positioning of microparts involves sophisticated assembly procedures a good understanding microtribological phenomena. Due to very low object mass, adhesion between micropart tool (usually mechanical gripper) becomes performance-limiting factor. Adhesion effects can be even larger than force that frees from thus making correct impossible. Many useful design principles for optimized properties found in biological systems. this paper foot an insect surface was evaluated. The attachment pads great green bush cricket (Tettigonia viridissima) - used attach safely variety different surfaces were investigated draw conclusions could implemented future technical microsystems. It is shown are flexible micromechanical units capable self-adjusting scales roughness. erratic influence capillary action due adsorbed water presumably suppressed by hydrophobic layer on pads. Attaching releasing mechanisms as well accurate measurement discussed detail.