Capillary Negative Pressure Measured by Nanochannel Collapse
作者： Niels R. Tas , Maryana Escalante , Joost W. van Honschoten , Henri V. Jansen , M. Elwenspoek
DOI: 10.1021/LA903649N
关键词:
摘要: … a second wafer (carrying the membrane) to the first wafer (carrying the … the capillary negative pressure based on the full collapse of the capping plate, we focus the analysis on the drying …
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core.ac.uk 参考文章(13)
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